Development of individually-addressable parylene microtube arrays
Development of individually-addressable parylene microtube arrays
复制标题
开发可单独寻址的聚对二甲苯微管阵列
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
Yong Xu
中科院分区：
文献类型：
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作者：
Yuefa Li;H. Tu;R. Iezzi;P. Finlayson;Yong Xu
本文报道了一种新型的集成面内微通道的离面聚对二甲苯微管阵列的微加工技术。集成的微通道能够对微管进行单独寻址。这些装置允许以受控的时间和空间模式递送化学品，并促进基于神经递质的视网膜假体的研究。为了制造这些器件，首先通过深反应离子蚀刻和各向同性XeF2蚀刻来创建穿硅通孔和水平沟槽。然后，通过在通孔和沟槽内共形地沉积聚对二甲苯来同时形成聚对二甲苯微管和微通道。两种类型的设备已经制造和表征。一种类型的装置是刚性的，具有在同一芯片上制造的微管阵列和微通道。另一种是柔性的，与柔性聚对二甲苯电缆集成，可用于视网膜假体的体内动物研究。
This paper reports a novel technology of microfabricating out-of-plane parylene microtube arrays with integrated in-plane microchannels. The integrated microchannels enable the individual addressing of the microtubes. These devices permit the delivery of chemicals with controlled temporal and spatial patterns and facilitate the study of neurotransmitter-based retinal prosthesis. To fabricate these devices, through-silicon vias and horizontal trenches are first created by deep reactive-ion etching and isotropic XeF2 etching. Then, the parylene microtubes and microchannels are simultaneously formed by depositing parylene inside the vias and trenches conformally. Two types of devices have been fabricated and characterized. One type of device is rigid with microtube arrays and microchannels fabricated on the same chip. The other type is flexible, integrated with flexible parylene cables, which can be used for in vivo animal study of retinal prosthesis.