Channel Length Scaling in Graphene Field-Effect Transistors Studied with Pulsed Current-Voltage Measurements

Channel Length Scaling in Graphene Field-Effect Transistors Studied with Pulsed Current-Voltage Measurements
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DOI:
10.1021/nl103993z
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发表时间:
2011-03-01
期刊:
影响因子:
10.8
通讯作者:
Shepard, Kenneth L.
Shepard, Kenneth L.
中科院分区:
材料科学1区
文献类型:
--
作者:
Meric, Inanc;Dean, Cory R.;Shepard, Kenneth L.

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我们研究了石墨烯场效应晶体管(GFET)在短沟道长度下的电流饱和。饱和对于实现器件功率增益所需的低输出电导是必要的。双通道脉冲电流-电压测量可以被执行以消除栅极电介质中的捕获电荷的显著影响,这是石墨烯上的所有氧化物基电介质膜共同的问题。通过脉冲测量,沟道长度小至130 nm的石墨烯晶体管在饱和时实现低至0.3 mS/μ m的输出电导。器件的介电常数与沟道长度无关,与高场传输的速度饱和模型一致。饱和速度有一个密度依赖性与扩散运输光学声子发射限制一致。
We investigate current saturation at short channel lengths in graphene field-effect transistors (GFETs). Saturation is necessary to achieve low-output conductance required for device power gain. Dual-channel pulsed current-voltage measurements cow are performed to eliminate the significant effects of trapped charge in the gate dielectric, a problem common to all oxide-based dielectric films on graphene. With pulsed measurements, graphene transistors with channel lengths as small as 130 nm achieve output conductance as low as 0.3 mS/mu m in saturation. The transconductance of the devices is independent of channel length, consistent with a velocity saturation model of high-field transport. Saturation velocities have a density dependence consistent with diffusive transport limited by optical phonon emission.