K. Shibahara: "Doping Issues for sub-100 nm MOSFETs"Proceedings of 2001 Korea-japan Joint Workshop on Advanced Semiconductor Processes and Equipments, (ASPE '01). 160-164 (2001)
K. Shibahara: "Doping Issues for sub-100 nm MOSFETs"Proceedings of 2001 Korea-japan Joint Workshop on Advanced Semiconductor Processes and Equipments, (ASPE '01). 160-164 (2001)
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K. Shibahara:“亚 100 nm MOSFET 的掺杂问题”2001 年韩日先进半导体工艺和设备联合研讨会论文集(ASPE 01)。
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