Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine
Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine
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DOI：
10.1088/0957-0233/20/8/084004
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发表时间：
2009-08
影响因子：
2.4
通讯作者：
T. Hausotte;B. Percle;G. Jäger
中科院分区：
文献类型：
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作者：
T. Hausotte;B. Percle;G. Jäger
伊尔梅瑙理工大学开发的纳米定位和纳米测量机最初是为25 mm × 25 mm × 5 mm测量体积内的表面测量而设计的。干涉长度测量和驱动系统使其能够以0.1 nm的分辨率移动载物台，并且在所有三个轴上的定位不确定性小于10 nm。根据安装的探头系统，可以执行各种测量任务。大多数使用的传感器是一维表面探头;然而，一些任务需要测量侧壁和其他三维特征。一个新的控制系统，基于I++ DME规范，在设备中实现。改进了I++ DME扫描功能，增加了特殊扫描功能，支持先进的三维扫描方法，进一步满足了扫描力显微镜和微坐标测量的需求。这项工作给出了这些新的功能和应用程序，他们为几个不同的测量概述。
The nanopositioning and nanomeasuring machine developed at the Ilmenau University of Technology was originally designed for surface measurements within a measuring volume of 25 mm × 25 mm × 5 mm. The interferometric length measuring and drive systems make it possible to move the stage with a resolution of 0.1 nm and a positioning uncertainty of less than 10 nm in all three axes. Various measuring tasks are possible depending on the installed probe system. Most of the sensors utilized are one-dimensional surface probes; however, some tasks require measuring sidewalls and other three-dimensional features. A new control system, based on the I++ DME specification, was implemented in the device. The I++ DME scan functions were improved and special scan functions added to allow advanced three-dimensional scan methods, further fulfilling the demands of scanning force microscopy and micro-coordinate measurements. This work gives an overview of these new functions and the application of them for several different measurements.