Effects of laser-ablation target damage on particulate production investigated by laser scattering with deposited thin film and target analysis
Effects of laser-ablation target damage on particulate production investigated by laser scattering with deposited thin film and target analysis
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通过激光散射沉积薄膜和目标分析研究激光烧蚀目标损伤对颗粒产生的影响
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发表时间：
1996
期刊：
影响因子：
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通讯作者：
J. Lash
中科院分区：
文献类型：
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作者：
H. L. Spindler;R. Gilgenbach;J. Lash
已经进行了实验，将烧蚀颗粒的密度和尺寸与入射到纯固体铝靶的单个位置的 KrF 准分子激光（248 nm，40 ns，<1.2 J）脉冲的数量相关联，并将颗粒产生与靶表面损伤相关联。对硅基板上激光烧蚀沉积的铝膜进行分析，以确定直径大于 0.5 μm 的烧蚀颗粒的密度。对于未损坏的目标，激光沉积颗粒密度约为每 1000 次射击 8.6×105 cm−2。受损目标（经过 1000 个激光脉冲）在基材上每 1000 次射击产生的密度约为 1.6×106 cm−2。染料激光光学散射也被用来实时测量激光烧蚀羽流中颗粒的速度和相对颗粒密度与目标损伤的关系。结果表明，当目标损伤增加到 3000 个激光脉冲时，颗粒物的产生迅速增加；经过这么多次拍摄后...
Experiments have been carried out to correlate ablated particulate density and size to the number of KrF excimer laser (248 nm, 40 ns, <1.2 J) pulses incident on a single location of a pure solid aluminum target and to relate particulate production to target surface damage. An analysis of laser ablation deposited aluminum films on silicon substrates was used to determine the density of ablated particulate greater than 0.5 μm in diameter. For an undamaged target, the laser deposited particulate density was on the order of 8.6×105 cm−2 per 1000 shots. A damaged target (following 1000 laser pulses) produced a density on the order of 1.6×106 cm−2 per 1000 shots on the substrate. Dye laser optical scattering was also used to measure, in real time, the velocity of the particulate and the relative particulate density in the laser‐ablation plume versus target damage. Results indicated a rapid rise in the production of particulate as target damage was increased up to 3000 laser pulses; after this number of shots t...