Strategies for High Quality Injection Moulding of Polymer Nanopillars
Strategies for High Quality Injection Moulding of Polymer Nanopillars
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DOI：
10.1002/mame.201400134
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发表时间：
2015-02
影响因子：
3.9
通讯作者：
R. Pedersen;Qiang-Yan Xu;J. Stormonth-Darling;N. Gadegaard
中科院分区：
文献类型：
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作者：
R. Pedersen;Qiang-Yan Xu;J. Stormonth-Darling;N. Gadegaard
注塑成型是一种经过验证的高通量生产纳米结构的技术，但由于空腔填充的复杂性，凸起结构的复制是一个相当大的挑战。我们开发了一个平台来系统地研究纵横比高达 1.2:1 的纳米结构的影响。通过一种新颖的制造方法，使用以厚度梯度沉积的等离子体聚合己烷层作为牺牲蚀刻掩模，生产出包含高度连续变化的纳米结构的主模板。结果表明，仔细选择工艺参数可以控制纳米柱复制品尺寸的拉伸，从而允许使用单个母版实现各种最终图案高度。
Injection moulding is a proven technology for high-throughput production of nanostructures, but replication of raised structures is a considerable challenge, due to the complexities of cavity filling. We have developed a platform to systematically study the effects of nanostructures with aspect ratios up to 1.2:1. A master template containing nanostructures with a continuous variation in height is produced by a novel fabrication approach using a plasma polymerized hexane layer, deposited with a thickness gradient, as a sacrificial etch mask. Results show that a careful choice of process parameters can control the stretching of nanopillar replica dimensions, allowing a variety of final pattern heights using a single master.