Development of a figure correction method having spatial resolution close to 0.1 mm
Development of a figure correction method having spatial resolution close to 0.1 mm
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开发空间分辨率接近0.1mm的图形校正方法
DOI：
10.1117/12.520825
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
T. Ishikawa
中科院分区：
文献类型：
--
作者：
Y. Mori;K. Yamauchi;K. Yamamura;H. Mimura;Y. Sano;A. Saito;K. Endo;A. Souvorov;M. Yabashi;K. Tamasaku;T. Ishikawa
采用一种新的形状校正方法制作椭圆镜，以实现高像质的一维发散X射线束。还使用波动光学模拟器研究了发散X射线束的图形误差和强度均匀性之间的相互关系，并表明在相对较短的空间波长范围内的图形误差导致高对比度的干涉条纹。利用微拼接干涉仪和弹性发射加工技术，对横向分辨率接近0.1mm的椭圆镜进行了面形校正。在SPring-8处观察到由所制造的反射镜获得的一维发散X射线，并评估其具有足够平坦的强度分布。
A new figure correction method is applied to fabricate an elliptical mirror to realize a one-dimensionally diverging X-ray beam having high image quality. Mutual relations between figure errors and intensity uniformities of diverging X-ray beams are also investigated using a wave-optical simulator and indicate that figure errors in relatively short spatial wavelength ranges lead to high-contrast interference fringes. By using the microstitching interferometer and elastic emission machining, figure correction of an elliptical mirror with lateral resolution close to 0.1mm was carried out. A one-dimensional diverging X-ray obtained by the fabricated mirror was observed at SPring-8 and evaluated to have a sufficiently flat intensity distribution.