Design of a top mirror for the n-GaAs homojunction far-infrared/terahertz detectors

Design of a top mirror for the n-GaAs homojunction far-infrared/terahertz detectors
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DOI:
10.1063/1.3491043
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发表时间:
2010-10
影响因子:
3.2
通讯作者:
G. Deng;Y. Zhang;W. Shen
G. Deng;Y. Zhang;W. Shen
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
G. Deng;Y. Zhang;W. Shen

文献摘要

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研究了谐振腔增强同质结界面工作函数内光发射(HIWIP)远红外/太赫兹(THz)探测器的顶镜。针对现有的半优化n-GaAs HIWIP FIR/THz探测器,研究了两种顶部反射镜的设计,以提高量子效率。正品或同等单层经证明不合格为顶镜。提出了一种基于内禀砷化镓二维周期性反金字塔结构作为顶镜的设计方案。所得量子效率可高达29.0%。提出了这种二维周期性反金字塔型本构GaAs顶镜的初步制作思路和初步解决方案。这种顶镜的设计思想对其他FIR/THz器件也有借鉴意义。
The top mirror of the resonant cavity enhanced homojunction interfacial workfunction internal photoemission (HIWIP) far-infrared (FIR)/terahertz (THz) detector is investigated. Aiming at an existing half-optimized n-GaAs HIWIP FIR/THz detector, two designs of the top mirror are investigated to increase the quantum efficiency. The genuine or equivalent single layer is proved to be unqualified as the top mirror. A design based on the two-dimensional (2D) periodical reversed pyramidal structure of intrinsic GaAs is proposed as the top mirror. The resulted quantum efficiency can be as high as 29.0%. Some elementary thoughts and a tentative fabricating solution of this 2D periodical reversed pyramidal intrinsic GaAs top mirror are suggested. The designing ideas of this kind of top mirror may also be applied to other FIR/THz devices for reference.