Plasma Chemical Study of a RF Discharge Containing Aluminum Tri‐Isopropoxide Using MIR Absorption Spectroscopy Based on External‐Cavity Quantum Cascade Lasers
Plasma Chemical Study of a RF Discharge Containing Aluminum Tri‐Isopropoxide Using MIR Absorption Spectroscopy Based on External‐Cavity Quantum Cascade Lasers
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基于外腔量子级联激光器的中红外吸收光谱对含有三异丙醇铝的射频放电的等离子体化学研究
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
Holger Kersten
中科院分区：
文献类型：
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作者：
D. Lopatik;S. Niemietz;Maik Fröhlich;J. Röpcke;Holger Kersten
利用外腔量子级联激光器（EC - QCL）的红外吸收光谱（IR - AS）研究了Ar和Ar/N2射频等离子体中掺有三异丙醇铝（ATI）的金属有机前驱体的碎片化。实验在非对称电容耦合反应器中进行，频率为f = 13.56 MHz，压力为p = 10 Pa。放电功率范围为P = 40 ~ 100 W。利用EC‐QCLAS技术监测了血浆中6种稳定分子CH4、C2H2、C2H4、H2O、HCN和HNO3浓度的变化。发现这些等离子体化学产物的浓度范围约为7 × 1012 - 2 × 1014分子cm-3（©2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim）
In Ar and Ar/N2 RF plasmas with admixtures of aluminum tri‐isopropoxide (ATI) the fragmentation of this metal‐organic precursor has been studied by means of infrared absorption spectroscopy (IR‐AS) using an external‐cavity quantum cascade laser (EC‐QCL) arrangement. The experiments were performed in an asymmetric capacitively coupled reactor at a frequency of f = 13.56 MHz and a pressure of up to p = 10 Pa. The discharge power was in the range of P = 40 – 100 W. Using EC‐QCLAS the evolution of the concentrations of six stable molecules, CH4, C2H2, C2H4, H2O, HCN and HNO3, has been monitored in the plasma. The concentrations of these plasma chemical products were found to be in the range of about 7 × 1012 – 2 × 1014 molecules cm–3 (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)