Three-dimensional Shape Measurement for X-ray Ellipsoidal Mirror
Three-dimensional Shape Measurement for X-ray Ellipsoidal Mirror
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X射线椭球镜三维形状测量
DOI：
10.1117/12.2273666
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
and H. Mimura,
中科院分区：
文献类型：
--
作者：
T. Kume;Y. Takei;S. Egawa;G. Yamaguchi;H. Motoyama;and H. Mimura,
X射线椭球镜要求其内表面具有纳米级的形状精度。由于表面加工的困难，电铸使用高精度的标准芯轴已被应用于反射镜的制造。为了研究电铸的复制精度，必须开发一种测量反射镜整个内表面的方法。本研究的目的是评估电铸的形状复制精度。本研究开发了一套X射线椭球镜三维面形测量装置。该装置由激光测头、接触测头、参考平面、Z轴工作台和旋转工作台组成。首先，在几个角度位置测量垂直放置在旋转台上的心轴或反射镜的纵向轮廓。随后，在不重新调整被测样品的情况下，以0.1 mm的规则间隔测量每个高度处的圆度。在每次测量期间，通过参考探针和参考平面之间的距离，计算运动误差的影响并从每个轮廓中减去。将圆度数据与纵向轮廓相结合，获得整个表面的三维误差分布。使用具有纳米级形状精度的芯轴和复制镜，测量装置的性能和复制精度进行了评估。测量重复性的单纳米级和亚100纳米级的复制精度被确认。
An X-ray ellipsoidal mirror requires nanometer-level shape accuracy for its internal surface. Owing to the difficulty in processing the surface, electroforming using a high precision master mandrel has been applied to mirror fabrication. In order to investigate the replication accuracy of electroforming, a measurement method for the entire internal surface of the mirror must be developed. The purpose of this study is to evaluate the shape replication accuracy of electroforming. In this study, a three-dimensional shape measurement apparatus for an X-ray ellipsoidal mirror is developed. The apparatus is composed of laser probes, a contact probe, reference flats, a z-axis stage, and a rotation table. First, longitudinal profiles of a mandrel or mirror placed vertically on the rotation table are measured at several angular positions. Subsequently, without realignment of the measured sample, circularity at every height is measured at regular intervals of 0.1 mm. During each measurement, the effect of motion errors is calculated and subtracted from each profile by referring to the distances between the probes and reference flats. Combining the circularity data with the longitudinal profiles, a three-dimensional error distribution of the entire surface is obtained. Using a mandrel with nanometer-level shape accuracy and a replicated mirror, the performance of the measurement apparatus and the replication accuracy are evaluated. Measurement repeatability of single-nanometer order and replication accuracy of sub-100-nm order are confirmed.