An investigation of cluster formation in an ionized cluster beam deposition source
An investigation of cluster formation in an ionized cluster beam deposition source
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电离簇束沉积源中簇形成的研究
DOI：
10.1116/1.577180
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发表时间：
1991
期刊：
影响因子：
--
通讯作者：
I. Yamada
中科院分区：
文献类型：
--
作者：
R. McEachern;W. Brown;M. Jarrold;M. Sosnowski;G. Takaoka;H. Usui;I. Yamada
我们研究了从坩埚喷嘴中加热到高达1950 K（对应于银蒸气压约为30 Torr）的银蒸气中膨胀的银团簇（25<n<1600）的浓度。实验的目的是确定是否有足够的这些簇对离子增强银膜沉积有显著影响，如离子簇束（ICB）沉积所假定的那样。利用准分子激光在248nm （KrF）或193nm （ArF）光离部分蒸汽，获得了飞行时间质谱。离子垂直于中性物质的平均速度方向提取，并在20 cm无场飞行路径后用法拉第板检测。在实验不确定度的水平上，没有令人信服的证据表明银蒸气压在2-30托（典型的ICB）范围内存在大团簇。我们得出结论，在我们的实验条件下，5000个原子中不超过一个是……
We have investigated the concentration of Agn clusters (25<n<1600) in a vapor of Ag expanding from the nozzle of a crucible heated to temperature as high as 1950 K (which corresponds to a silver vapor pressure of about 30 Torr). The goal of the experiment was to determine whether there were enough of these clusters present to have a significant effect on the ion‐enhanced deposition of Ag films, as postulated for ion cluster beam (ICB) deposition. Time‐of‐flight mass spectra were obtained by using an excimer laser at 248 nm (KrF) or 193 nm (ArF) to photoionize a fraction of the vapor. The ions were extracted normal to the direction of average velocity of the neutral species and detected with a Faraday plate after a 20 cm field‐free flight path. At the level of experimental uncertainty, no convincing evidence for the presence of large clusters was found for Ag vapor pressures in the 2–30 Torr range (typical for ICB). We conclude that under the conditions of our experiment, not more than one atom in 5000 is ...