Tungsten Oxide Flow Sensor and its Performance Regulation
Tungsten Oxide Flow Sensor and its Performance Regulation
复制标题
氧化钨流量传感器及其性能调节
DOI：
10.1109/tim.2022.3177202
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发表时间：
2022
影响因子：
5.6
通讯作者：
Fanrui Zhang
中科院分区：
文献类型：
--
作者：
Yuanfang Mao;Yizhang Wen;Haowen Chen;Min Liao;Fanrui Zhang
本文研究了一种基于流动电位现象的新型氧化钨流量传感器，它不仅能满足流量测量的基本要求，而且具有超低成本、低功耗（自发感测流量）、适应性强（结构设计灵活）等优点。采用不同的电化学氧化方法制备了四种氧化钨传感器，并安装在密闭的泵流量测量系统中进行流量响应实验。结果表明，四种氧化钨的流量响应具有不同的灵敏度和相似的响应时间，线性和稳定性。此外，为了探讨氧化钨传感器的性能调节规律，对四种氧化钨片电极进行了SEM-EDS表征，发现氧化程度越深的氧化钨片电极具有更高的灵敏度。综上所述，氧化钨流量传感器具有良好的流量响应和易于调节的方法，是一种很有前途的流量传感器。
This paper studies a novel tungsten oxide flow sensor based on the phenomenon of the streaming potential, which can not only meet the basic requirements of flow measurement but also has many other advantages, such as ultra-low cost, low power consumption (spontaneously sensing flow), and high adaptability (flexible structure design). Four tungsten oxide sensors are prepared by different electrochemical oxidation methods and installed in a closed pump flow measurement system to carry out flow rate response experiments. The results show that the flow rate responses of four tungsten oxide have different sensitivities and similar response time, linearity and stability. Moreover, in order to investigate the performance regulation laws of tungsten oxide sensor, the four tungsten oxide sheet electrodes are characterized by SEM-EDS, and it is found that the tungsten oxide sheet electrode with a deeper oxidation degree has higher sensitivity. In summary, tungsten oxide flow sensor has excellent flow rate response and easy regulation method so that it is a very promising flow sensor.