Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability
Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability
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静电驱动 MEMS 开关中的结构热电耦合建模及其对开关稳定性的影响
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
M. Younis
中科院分区：
文献类型：
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作者：
H. Ouakad;M. Younis
对MEMS悬臂开关在电载荷和热载荷作用下的静态行为和倒塌不稳定性进行了建模和分析。热负载力可能是微动开关的大量开关触点的结果。该模型将微梁视为连续介质，电场力为位移的非线性函数，并考虑了微梁的边缘场效应。假设电场力分布在微梁下方的特定长度上。边界值求解器被用来研究崩溃的不稳定性，这使得微梁从其未卡住的配置接触基板，并被卡在所谓的钉扎配置。我们发现温度对开关的静态稳定性的影响可以忽略不计。然后，我们调查的热加热的影响，由于电流对悬臂开关，而它是在上的位置（粘附位置）。我们还发现对开关的静态稳定性有轻微的影响。
Modeling and analysis for the static behavior and collapse instabilities of a MEMS cantilever switch subjected to both electrical and thermal loadings are presented. The thermal loading forces can be as a result of a huge amount of switching contact of the microswitch. The model considers the microbeam as a continuous medium and the electric force as a nonlinear function of displacement and accounts for its fringing-field effect. The electric force is assumed to be distributed over specific lengths underneath the microbeam. A boundary-value solver is used to study the collapse instability, which brings the microbeam from its unstuck configuration to touch the substrate and gets stuck in the so-called pinned configuration. We have found negligible influence of the temperature on the static stability of the switch. We then investigate the effect of the thermal heating due to the current flow on the cantilever switch while it is in the on position (adhered position). We also found slight effect on the static stability of the switch.