Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
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DOI：
10.1109/fcs.2018.8597475
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发表时间：
2018-05
期刊：
影响因子：
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通讯作者：
Yansong Yang;Ruochen Lu;T. Manzaneque;S. Gong
中科院分区：
文献类型：
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作者：
Yansong Yang;Ruochen Lu;T. Manzaneque;S. Gong
这项工作提出了一种新型的微机电系统（MEMS）谐振器朝向Ka波段（26.5-40 GHz）的第五代（5G）无线通信。在悬浮Z切LiNbO 3薄膜中利用第五阶和第七阶非对称（A5和A7）兰姆波模式实现了21.4和29.9 GHz的谐振频率。所制造的器件已经证明了机电耦合$（k_{t}^{2}）$为1.5%和0.94%，并且对于A5和A7分别提取了406和474的机械$Qs$。在此频率范围内工作的压电MEMS谐振器的品质因数是最高的。所展示的性能显示了LiNbO 3非对称模式器件满足5G前端滤波要求的强大潜力。
This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40 GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth and seventh order asymmetric (A5 and A7) Lamb-wave modes in a suspended Z-cut lithium niobate (LiNbO3) thin film. The fabricated device has demonstrated an electromechanical coupling $(k_{t}^{2})$ of 1.5% and 0.94% and extracted mechanical $Qs$ of 406 and 474 for A5 and A7 respectively. The quality factors are the highest reported for piezoelectric MEMS resonators operating at this frequency range. The demonstrated performance has shown the strong potential of LiNbO3 asymmetric mode devices to meet the front-end filtering requirements of 5G.