Replication of a multilayer supermirror

Replication of a multilayer supermirror
复制标题

多层超级镜面的复制

DOI:
10.1117/12.331279
复制
发表时间:
1998
期刊:
--
影响因子:
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通讯作者:
Y. Namba
Y. Namba
中科院分区:
--
文献类型:
--
作者:
A. Furuzawa;K. Yamashita;H. Kunieda;Y. Tawara;K. Tamura;K. Haga;N. Nakamura;N. Nakajo;H. Takata;T. Okajima;Y. Ogasaka;G. Lodha;Y. Namba

文献摘要

被引文献

相似文献

在采用复制法制备X射线反射镜时,Au被认为是唯一可以用作反射镜表面的材料。然而,如果我们可以使用Pt或Ir,这些具有比Au更高的电子密度,作为表面,我们可以获得更高的反射率,特别是在硬X射线波段。此外,多层膜的直接复制对于高反射率和大规模生产工艺是非常有用的。我们使用Au复制箔作为多层膜的衬底。然而,复制箔的环氧树脂层容易被沉积期间的热损坏。这对于大规模生产工艺来说是一个严重的问题,因为我们必须花费很长的时间来存款多层膜以保持高反射率。研究了多层膜的直接复制,成功地获得了与原始膜一样高的反射率。此外,我们不断努力提高反射器的质量作为飞行品质。我们将报告的结果和功能的多层复制及其应用的硬X射线望远镜的前景。
In the fabrication of the x-ray reflector using the replication method, Au was thought as the only material which can be used as the surface of reflector. However, if we could use the Pt or Ir, these has higher electron density than Au, as the surface, we can obtain higher reflectivity especially in the hard x-ray band. Furthermore, direct replication of the multilayer is very useful for the high reflectivity and mass-production process. We used the Au replica foil as the substrate of the multilayer. However, the epoxy layer of the replica foil was easily damaged by the heat during the deposition. This is a serious problem for the mass-production process, since we must take a long time to deposit the multilayer to keep the high reflectivity. We studied the direct replication of the multilayer, and successes to obtain the reflectivity as high as original one. Furthermore, we keep the trying to improve the quality of the reflector as flight quality. We will report the results and feature prospects of the replication of the multilayer and its application to the hard x-ray telescope.