Designed Patterning of Mesoporous Metal Films Based on Electrochemical Micelle Assembly Combined with Lithographical Techniques
Designed Patterning of Mesoporous Metal Films Based on Electrochemical Micelle Assembly Combined with Lithographical Techniques
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DOI：
10.1002/smll.201902934
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发表时间：
2019-10-11
期刊：
影响因子：
13.3
通讯作者：
Yamauchi, Yusuke
中科院分区：
文献类型：
--
作者：
Lim, Hyunsoo;Kim, Jeonghun;Yamauchi, Yusuke
介孔贵金属及其获得独特图像化结构的图像化技术在电催化、光催化和光电子器件应用中具有很高的吸引力，因为它们具有高水平的暴露活性位置、级联电催化位点和大表面积等便利的性质。然而，尽管对开发与介孔金属图像化相关的技术的需求不断增长，介孔衬底的图像化技术仍然局限于金属氧化物和二氧化硅薄膜。在这项研究中，首次展示了使用光刻技术预制的图案金（Au）衬底上的介孔金属薄膜。首先，通过不同的沉积时间和电压，证明了在图案化金衬底上介孔金金属薄膜的不同生长速率。此外，介孔金薄膜也被制作在各种图案的金衬底上，包括条纹和网状线。使用光刻胶绝缘掩膜的另一种制造方法也在图案中产生介孔金的生长。此外，在相同类型的衬底上展示了钯（Pd）和钯铜合金（PdCu）的图图化介孔膜，以显示该方法的多功能性。图案化介孔金膜（PMGF）比非图案化介孔金膜（NMGF）具有更高的电化学活性表面积（ECSA）和更高的葡萄糖氧化敏感性。
Mesoporous noble metals and their patterning techniques for obtaining unique patterned structures are highly attractive for electrocatalysis, photocatalysis, and optoelectronics device applications owing to their expedient properties such as high level of exposed active locations, cascade electrocatalytic sites, and large surface area. However, patterning techniques for mesoporous substrates are still limited to metal oxide and silica films, although there is growing demand for developing techniques related to patterning mesoporous metals. In this study, the first demonstration of mesoporous metal films on patterned gold (Au) substrates, prefabricated using photolithographic techniques, is reported. First, different growth rates of mesoporous Au metal films on patterned Au substrates are demonstrated by varying deposition times and voltages. In addition, mesoporous Au films are also fabricated on various patterns of Au substrates including stripe and mesh lines. An alternative fabrication method using a photoresist insulating mask also yields growth of mesoporous Au within the patterning. Moreover, patterned mesoporous films of palladium (Pd) and palladium-copper alloy (PdCu) are demonstrated on the same types of substrates to show versatility of this method. Patterned mesoporous Au films (PMGF) shows higher electrochemically-active surface area (ECSA) and higher sensitivity toward glucose oxidation than nonpatterned mesoporous Au films (NMGF).