Controlled growth of ZnO nanorod arrays via wet chemical route for NO2 gas sensor applications
Controlled growth of ZnO nanorod arrays via wet chemical route for NO2 gas sensor applications
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DOI：
10.1016/j.snb.2015.07.084
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发表时间：
2015-12
影响因子：
8.4
通讯作者：
S. Vanalakar;V. Patil;N. Harale;S. Vhanalakar;M. Gang;Jin Young Kim;P.S Patil;Jin H. Kim
中科院分区：
文献类型：
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作者：
S. Vanalakar;V. Patil;N. Harale;S. Vhanalakar;M. Gang;Jin Young Kim;P.S Patil;Jin H. Kim
金属氧化物气体传感器是一种很有前途的设备，它被广泛用于在中等温度下检测各种气体。在本研究中，二氧化氮（NO2）传感器采用氧化锌（ZnO）纳米棒阵列。以乙酸锌为前驱体，采用湿法制备了不同长度的ZnO纳米棒阵列（ZNAs）。利用x射线衍射仪（XRD）和场发射扫描电镜（FESEM）研究了ZNAs的结构和表面形貌。XRD图谱显示，ZNAs具有纤锌矿晶体结构，优先取向于（0 0 2）方向。（0 0 2）平面的强度随纳米棒的长度而变化。FESEM显微形貌显示，纳米棒与衬底呈垂直排列，纳米棒的直径和长度随纳米棒沉积时间的增加而增加。研究了纳米棒长度、工作温度、时间和气体浓度对气敏性能的影响。观察到长度和杆间空间对器件的气敏性能起着至关重要的作用。ZNA气体传感器沉积9小时，在175°C的温度下工作，能够检测浓度为100 ppm的no2，灵敏度高达3100%。
Metal oxide gas sensors are promising devices that are widely used to detect various gases at moderate temperatures. In this study, nitrogen di-oxide (NO2) sensors were fabricated using zinc oxide (ZnO) nanorod arrays. ZnO nanorod arrays (ZNAs) with various rod lengths were deposited using a wet chemical route with zinc acetate as a precursor. The structural and surface morphological properties of the ZNAs were investigated using X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM), respectively. The XRD patterns showed ZNAs with wurtzite crystal structures that were preferentially oriented in the (0 0 2) direction. The intensity of the (0 0 2) plane was found to vary with the length of the nanorods. FESEM micrographs show that the ZNAs had a vertical alignment perpendicular to the substrate, and the diameter and length of the nanorods increased as the nanorod deposition time was increased. The gas sensing performance was studied as a function of the nanorod length, operating temperature, time and gas concentration. The length and inter-rod space was observed to play a crucial role in determining the gas sensing performance of the devices. ZNA gas sensors deposited for 9 h and operating at a temperature of 175 °C were able to detect NO2at a concentration of 100 ppm with a high sensitivity of 3100%.