Fabrication and Morphological Control of a Palladium Film with a Three-Dimensional Nano-Network Structure as a Hydrogen Gas Sensing Material using Organic Acid Chelation
Fabrication and Morphological Control of a Palladium Film with a Three-Dimensional Nano-Network Structure as a Hydrogen Gas Sensing Material using Organic Acid Chelation
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DOI：
10.1557/adv.2019.82
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发表时间：
2019-01
期刊：
影响因子：
0.8
通讯作者：
Takuji Ube;A. Kawamoto;Tomoya Nishi;T. Ishiguro
中科院分区：
文献类型：
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作者：
Takuji Ube;A. Kawamoto;Tomoya Nishi;T. Ishiguro
纳米多孔钯(Pd)薄膜具有较高的灵敏度和选择性，可应用于氢气敏感材料。在我们以前的研究中，利用有机酸的螯合能力，以AlPd母合金膜为原料，通过去合金化的方法制备了具有三维网络结构的纳米多孔Pd膜。这一过程简单且环保，因为它只需要百万分之几的有机酸，而且不会排出包括重金属离子在内的强酸废液。对该方法进行了改进，以提高非合金样品的Pd纯度、反应速度和形貌控制。在本研究中，发现了AlPd母合金膜中成分起伏的存在，并评价了它对非合金化样品形貌的影响。此外，在制备AlPd母合金薄膜的过程中，可以通过在Ar溅射气体中添加N_2气体来控制这种模式。
Nano-porous palladium (Pd) thin films could potentially be applied to hydrogen gas sensing materials with high sensitivity and selectivity. In our previous study, a nano-porous Pd film was fabricated with a three-dimensional network structure from an AlPd mother alloy film by a dealloying method using the chelating ability of an organic acid. This process was simple and environmentally friendly because it only required organic acid in a ppm concentration, and did not exhaust a strong acid waste solution, including heavy metal ions. This method was modified to improve the Pd purity of the dealloyed specimen, reaction rate, and morphology control. In this study, the existence of a composition undulation pattern was shown in the AlPd mother alloy film, and its effects on the morphology of the dealloyed specimen were evaluated. Furthermore, this pattern could be controlled by N_2 gas addition to the Ar sputtering gas during the preparation of the AlPd mother alloy film.