Nanoindentation of a 10 nm thick thin film
Nanoindentation of a 10 nm thick thin film
复制标题
DOI：
10.1557/jmr.1999.0299
复制
发表时间：
1999-06-01
影响因子：
2.7
通讯作者：
Tanaka, K
中科院分区：
文献类型：
--
作者：
Sawa, T;Akiyama, Y;Tanaka, K
在纳米级的纳米压痕测试中，压头尖端的圆度或截断是不可避免的。本文通过有限元分析，分析了圆形三角形压痕在层状弹性半空间中的压痕问题，并建立了一种由纳米压痕数据估算薄膜固有弹性模量的方法。该方法被应用于分析的纳米压痕数据小于10 nm的穿透深度上的10 nm厚的类金刚石碳膜上沉积的50 nm厚的磁性层。
In a nanometer order nanoindentation test, roundness or truncation of the indenter tip cannot be avoided. In this paper, we have analyzed the indentation problem of a rounded triangular indentation into a layered elastic half-space by a finite element analysis and then established a method to estimate the intrinsic elastic modulus of the film from the nanoindentation data. The method was applied to analyze the nanoindentation data of a less-than-10 nm penetration depth on a 10 nm thick diamondlike carbon film deposited on a 50 nm thick magnetic layer.