TiO2−x thin films as oxygen sensor
TiO2−x thin films as oxygen sensor
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DOI：
10.1016/s0925-4005(99)00447-5
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发表时间：
2000-07
影响因子：
8.4
通讯作者：
Liaoying Zheng;Ming-xia Xu;T. Xu
中科院分区：
文献类型：
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作者：
Liaoying Zheng;Ming-xia Xu;T. Xu
采用溶胶-凝胶法制备tio2薄膜。以钛酸四丁酯为原料，无水乙醇为溶剂。在溶液中加入一些稳定剂以获得稳定的溶胶。通过浸涂、干燥、预热，在al2o3基体上形成tio2薄膜。然后将TiO2膜在1000℃的h2o2气氛中还原得到TiO2−x膜。x射线衍射（XRD）测定的x值在0 ~ 0.5之间。实验结果表明，TiO2−x薄膜在800℃氧化还原气氛中具有良好的氧敏感性和再现性，在n2气氛中具有优异的电阻-温度稳定性。
The TiO2films are prepared by sol–gel method. The tetrabutyl titanate and absolute ethanol are used as raw material and solvent, respectively. Some stabilizing agents are added in the solution to obtain stable sols. By dip-coating, drying, preheating, the TiO2films on Al2O3substrates are formed. Then the TiO2−xfilms are obtained after reducing the TiO2films in H2atmosphere at 1000°C. The value of x determined by X-ray diffraction (XRD) is between 0 and 0.5. The experiment results show that the TiO2−xfilms have good oxygen sensitivity and reproducibility when tested in oxidizing–reducing atmosphere at 800°C and excellent resistance–temperature stability in N2atmosphere.