High-sensitivity force detection by phase-modulation atomic force microscopy
High-sensitivity force detection by phase-modulation atomic force microscopy
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DOI：
10.1143/jjap.45.l793
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发表时间：
2006-08-01
期刊：
影响因子：
--
通讯作者：
Sugawara, Yasuhiro
中科院分区：
文献类型：
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作者：
Kobayashi, Naritaka;Li, Yan Jun;Sugawara, Yasuhiro
研究了相位调制原子力显微镜（PM-AFM）的性能，以实现高力灵敏度和高分辨率成像。PM-AFM检测振荡悬臂相对于激励信号的相位变化，并将其用作反馈信号。从理论和实验上比较了PM-AFM和调幅AFM的力灵敏度。我们表明，PM-AFM具有更好的信噪比比AM-AFM。结果表明，PM-AFM得到的静电力图像比AM-AFM得到的静电力图像具有更清晰的对比度。
Performance of phase-modulation atomic force microscopy (PM-AFM) is investigated to achieve high force sensitivity and high-resolution imaging. PM-AFM detects the phase change of the oscillating cantilever relative to the excitation signal and uses it as the feedback signal. We compare the force sensitivity of PM-AFM with that of amplitude-modulation AFM (AM-AFM) theoretically as well as experimentally. We show that PM-AFM has a better signal-to-noise ratio than AM-AFM. We demonstrate that the electrostatic force images obtained by PM-AFM have clearer contrast than those obtained by AM-AFM.