Wafer-scale high-throughput ordered arrays of Si and coaxial Si/Si(1-x)Ge(x) wires: fabrication, characterization, and photovoltaic application.
Wafer-scale high-throughput ordered arrays of Si and coaxial Si/Si(1-x)Ge(x) wires: fabrication, characterization, and photovoltaic application.
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DOI：
10.1021/nn202075z
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发表时间：
2011-07
期刊：
影响因子：
17.1
通讯作者：
Caofeng Pan;Zhixiang Luo;Chen Xu;Jun Luo;R. Liang;G. Zhu;Wenzhuo Wu;Wenxi Guo;Xingxu Yan-Xingxu-Ya
中科院分区：
文献类型：
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作者：
Caofeng Pan;Zhixiang Luo;Chen Xu;Jun Luo;R. Liang;G. Zhu;Wenzhuo Wu;Wenxi Guo;Xingxu Yan-Xingxu-Ya
我们开发了一种结合光刻和催化蚀刻的方法来制造大面积(在整个5英寸上均匀覆盖)。晶片)具有高吞吐量的垂直排列的单晶硅纳米线阵列。采用超高真空化学气相沉积(UHVCVD)技术，在硅线上进一步外延单晶SiGe层，制备了n-Si/p-SiGe同轴阵列。这种方法允许精确控制Si和Si/SiGe纳米线阵列的直径、长度、密度、间距、取向、形状、图案和位置，使基于合理设计的纳米线阵列制造器件阵列成为可能。提出了一种刻蚀工艺的制作机理。受Si/SiGe线阵优良的减反射性能的启发，我们在含有径向结的线阵的基础上构建了太阳能电池，其开路电压(V(Oc))为650 mV，短路电流密度(J(Sc))为8.38 mA/cm(2)，填充系数为0.6，能量转换效率(η)为3.26%。这种p-n径向结构在低成本的光伏(PV)太阳能转换方面具有很大的应用潜力。
We have developed a method combining lithography and catalytic etching to fabricate large-area (uniform coverage over an entire 5-in. wafer) arrays of vertically aligned single-crystal Si nanowires with high throughput. Coaxial n-Si/p-SiGe wire arrays are also fabricated by further coating single-crystal epitaxial SiGe layers on the Si wires using ultrahigh vacuum chemical vapor deposition (UHVCVD). This method allows precise control over the diameter, length, density, spacing, orientation, shape, pattern and location of the Si and Si/SiGe nanowire arrays, making it possible to fabricate an array of devices based on rationally designed nanowire arrays. A proposed fabrication mechanism of the etching process is presented. Inspired by the excellent antireflection properties of the Si/SiGe wire arrays, we built solar cells based on the arrays of these wires containing radial junctions, an example of which exhibits an open circuit voltage (V(oc)) of 650 mV, a short-circuit current density (J(sc)) of 8.38 mA/cm(2), a fill factor of 0.60, and an energy conversion efficiency (η) of 3.26%. Such a p-n radial structure will have a great potential application for cost-efficient photovoltaic (PV) solar energy conversion.