Technique for Measuring the Conductance of Silicon-Nitride Membranes Using Johnson Noise Thermometry
Technique for Measuring the Conductance of Silicon-Nitride Membranes Using Johnson Noise Thermometry
复制标题
使用约翰逊噪声测温法测量氮化硅膜电导的技术
DOI：
10.1007/s10909-007-9701-6
复制
发表时间：
2008
影响因子：
2
通讯作者：
S. Withington
中科院分区：
文献类型：
--
作者：
K. Rostem;D. Glowacka;D. Goldie;S. Withington
摘要
我们提出了一种测量隔离氮化硅（SixNy）膜的热导率的技术，使用约翰逊噪声测温法。隔离的SixNy膜具有沉积在表面上的具有超导轨道的薄膜AuCu电阻器。这些电阻器既可用作热负载，也可用作温度计，通过阅读它们的低噪声约翰逊噪声（
${\sim}4\mbox{ pA/}\sqrt{\mathrm{Hz}}$
超导量子干涉器件（SQUID）。该技术在真实的时间内测量膜的温度-功率（T-P）关系，从中可以提取热导率的细节。我们提出了两个几何形状不同的SixNy膜在250 mK至1.2 K的温度范围内的初步结果。
Abstract
We present a technique for measuring the thermal conductance of isolated Silicon-Nitride (SixNy) membranes using Johnson noise thermometry. The isolated SixNy membranes have thin film AuCu resistors deposited on the surface with superconducting tracks. These resistors were used either as heat loads, or as thermometers by reading their Johnson noise with a low noise (
${\sim}4\mbox{ pA/}\sqrt{\mathrm{Hz}}$
) Superconducting Quantum Interference Device (SQUID). This technique measures, in real time, the Temperature-Power (T-P) relationship of the membrane, from which details of the thermal conductance can be extracted. We present preliminary results for two geometrically different SixNy membranes across a temperature range of 250 mK to 1.2 K.