Optical Imaging in Projection Microlithography
Optical Imaging in Projection Microlithography
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DOI：
10.1117/3.612961
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发表时间：
2005-03
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影响因子：
--
通讯作者：
A. Wong
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文献类型：
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作者：
A. Wong
从光以微小粒子的形式传播的微粒理论，到解释衍射现象的波动理论，再到波和微粒理论同时成立的量子理论，人类的光的概念在过去的200年里发生了很大的变化。我们所关心的光学投影光刻的原理基本上是在二十世纪之前形成的，在广义相对论之前，广义相对论规定了引力场会使光线弯曲。那时，奥古斯丁·让·菲涅尔（1788-1827）已经为光的波动理论奠定了坚实的基础，而詹姆斯·克拉克·麦克斯韦（1831-1879）关于光波是电磁波的猜想已经被海因里希·赫兹（1857-1894）证实。在本文的前三章中，我们回顾了与光刻成像分析相关的光的性质。本章从麦克斯韦方程组出发，推导出光的特性。我们将知道，光是横波，其电场和磁场矢量在与其传播方向垂直的平面上振动。当光与物理尺寸比其波长大的物体相互作用时，我们可以在许多情况下忽略场矢量，而用几何语言表述的定律近似麦克斯韦方程组。第二章讨论几何光学的这个问题。然而，为了描述光通过尺寸与波长相当或小于波长的孔的传输，我们需要借助衍射理论，这是我们在第三章讨论的主题。
From the corpuscular theory in which light propagates in the form of minute particles, to the wave theory that elucidates diffraction phenomena, to the quantum theory in which both the wave and corpuscular theories are simultaneously valid, humankind's concept of light has evolved much over the last two hundred years. The principles of optical projection lithography with which we are concerned were substantially formulated before the twentieth century, prior to the general theory of relativity, which stipulates the bending of light rays by gravitational fields. By that time, Augustin Jean Fresnel (1788-1827) had laid the wave theory of light on a firm foundation, and James Clerk Maxwell's (1831-1879) conjecture that light waves are electromagnetic had been verified by Heinrich Hertz (1857-1894). In the first three chapters of this text, we review properties of light that are relevant for analysis of image formation in photolithography. Starting with Maxwell's equations, we deduce the characteristics of light in this chapter. We shall learn that light is a transverse wave, with the electric and magnetic field vectors vibrating in a plane that is normal to its direction of propagation. When light interacts with objects whose physical dimensions are large compared with its wavelength, we can neglect the field vectors under many circumstances, and approximate Maxwell's equations by laws formulated in the language of geometry. This topic of geometrical optics is treated in Chapter 2. To describe light transmission through apertures whose dimensions are comparable to or smaller than the wavelength, however, we need to resort to diffraction theory, a subject we discuss in Chapter 3.