Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses

Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses
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飞秒激光脉冲照射后高温蚀刻去除蓝宝石内部三维无残留体积

DOI:
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发表时间:
2008
期刊:
Laser Chemistry Vol.2008, No.5
影响因子:
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通讯作者:
and S. Hashimoto
and S. Hashimoto
中科院分区:
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文献类型:
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作者:
S. Matsuo;K. Tokumi;T. Tomita;and S. Hashimoto

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