Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses
Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses
复制标题
飞秒激光脉冲照射后高温蚀刻去除蓝宝石内部三维无残留体积
DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
and S. Hashimoto
中科院分区:
文献类型:
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作者:
S. Matsuo;K. Tokumi;T. Tomita;and S. Hashimoto