New generation nuclear microprobe systems

New generation nuclear microprobe systems
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DOI:
10.1016/s0168-583x(01)00547-x
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发表时间:
2001-07-01
影响因子:
1.3
通讯作者:
Jamieson, DN
Jamieson, DN
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Jamieson, DN

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在过去的 20 年里,核显微镜的最小探针尺寸一直保持在 I pin 左右,只有少数小组报告亚微米探针尺寸约为 0.5 μm。核微探针设计方面尚未取得突破,无法显着提高空间分辨率。过去人们已经充分认识到打破阻碍减小探针尺寸的限制的困难。在过去的五年里,我们已经清楚地意识到其中一些限制可能并不像最初想象的那样具有限制性。例如,色差显然不像一阶离子光学计算所暗示的那么重要。鉴于过去 5 年中认识的加深,本文回顾了限制因素,并探讨了目前正在墨尔本和其他地方评估的几种新方法,以取得进展。这些方法包括改进射频离子源以提高光束亮度,并利用对某些透镜像差的宽松约束,从而允许使用高缩小倍率探针形成透镜系统。 (C) 2001 Elsevier Science B.V. 保留所有权利。
Over the past 20 years, the minimum probe size for nuclear microscopy has stayed around I pin with only a few groups reporting a sub-micron probe size around 0.5 mum. No breakthroughs in nuclear microprobe design have been forthcoming to produce dramatic improvements in spatial resolution. The difficulties of breaking the constraints that are preventing reduction of the probe size have been well recognised in the past. Over the past 5 years it has become clear that some of these constraints may not be as limiting as first thought. For example, chromatic aberration clearly is not as significant as implied from first-order ion optics calculations. This paper reviews the constraints in view of the increased understanding of the past 5 years and looks at several new approaches, presently being evaluated in Melbourne and elsewhere, on how to make progress. These approaches include modified RF ion sources for improved beam brightness and exploitation of relaxed constraints on some lens aberrations allowing the use of high demagnification probe forming lens systems. (C) 2001 Elsevier Science B.V. All rights reserved.