Fabrication of microstructures by wet etching of anodic aluminum oxide substrates
Fabrication of microstructures by wet etching of anodic aluminum oxide substrates
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DOI：
10.1021/cm0486565
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发表时间：
2005-08-09
影响因子：
8.6
通讯作者：
Lee, KH
中科院分区：
文献类型：
--
作者：
Jee, SE;Lee, PS;Lee, KH
阳极氧化铝（AAO）被用作微结构制造的基材。通过对 AAO 基板进行单步湿法刻蚀，获得了具有高深宽比的复杂结构。可以通过垂直侧壁同时获得不同形状和纵横比的结构。所制造结构的表面形态可以定制。预计可以使用该技术构建各种 MEMS/NEMS 设备。
Anodic aluminum oxide (AAO) was used as substrates of microstructure fabrication. Complex structures with high aspect ratios were obtained by the single-step wet etching of the AAO substrates. Structures with different shapes and aspect ratios could be simultaneously obtained with vertical sidewalls. The surface morphology of the fabricated structures could be tailored. It is expected that various MEMS/NEMS devices can be built using this technique.