Bit-Patterned Magnetic Recording: Theory, Media Fabrication, and Recording Performance
Bit-Patterned Magnetic Recording: Theory, Media Fabrication, and Recording Performance
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DOI：
10.1109/tmag.2015.2397880
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发表时间：
2015-05-01
影响因子：
2.1
通讯作者：
Yang, En
中科院分区：
文献类型：
--
作者：
Albrecht, Thomas R.;Arora, Hitesh;Yang, En
用于磁记录的位图案化介质（BPM）提供了一条以> 1 Tb/in（2）进行热稳定数据记录的途径，并规避了与扩展传统颗粒介质技术相关的许多挑战。BPM不是在随机颗粒的集合上记录比特，而是包括光刻图案化的隔离磁岛的有序阵列，每个磁岛存储1比特。BPM的制造被认为是其商业化的最大挑战。在本文中，我们描述了一种BPM制造方法，该方法结合了旋转台电子束光刻、嵌段共聚物的定向自组装、自对准双重图案化、纳米压印光刻和离子铣削，以产生基于CoCrPt合金材料的BPM，密度高达1.6 Td/in（2）。这种新型制造技术的组合实现了
Bit-patterned media (BPM) for magnetic recording provides a route to thermally stable data recording at >1 Tb/in(2) and circumvents many of the challenges associated with extending conventional granular media technology. Instead of recording a bit on an ensemble of random grains, BPM comprises a well-ordered array of lithographically patterned isolated magnetic islands, each of which stores 1 bit. Fabrication of BPM is viewed as the greatest challenge for its commercialization. In this paper, we describe a BPM fabrication method that combines rotary-stage e-beam lithography, directed self-assembly of block copolymers, self-aligned double patterning, nanoimprint lithography, and ion milling to generate BPM based on CoCrPt alloy materials at densities up to 1.6 Td/in(2). This combination of novel fabrication technologies achieves feature sizes of