An all-nickel magnetostatic MEMS scanner
An all-nickel magnetostatic MEMS scanner
复制标题
全镍静磁 MEMS 扫描仪
DOI：
10.1088/0960-1317/22/12/125008
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发表时间：
2012
影响因子：
2.3
通讯作者：
A. Seifert
中科院分区：
文献类型：
--
作者：
N. Weber;H. Zappe;A. Seifert
介绍了一种全电镀、低成本静磁MEMS扫描镜的设计、制作和详细特性。通过在牺牲衬底上电镀亮镍，可以制造出坚固的软磁微镜。这项技术比使用体硅微机械加工绝缘体上硅晶片制造静磁扫描仪的标准工艺更简单、更便宜。当外加磁场为0.23mT时，反射镜的共振偏转角为±7。这样的磁场很容易由微型螺线管产生，例如，使集成到内窥镜系统成为可能。
The design, fabrication and detailed characterization of a fully electroplated, magnetostatic low-cost MEMS scanning mirror are presented. By electroplating bright nickel on a sacrificial substrate, robust soft-magnetic micromirrors may be fabricated. The technology is simpler and cheaper than the standard process using bulk silicon micromachining of silicon-on-insulator wafers for fabricating magnetostatic scanners. The presented Ni mirrors exhibit deflection angles of±7 at resonance for small external magnetic fields of 0.23 mT. Such magnetic fields are easily generated by miniaturized solenoids, making integration, for instance, into endoscopic systems possible.