Mask-Free Patterning of High-Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses
Mask-Free Patterning of High-Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses
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DOI：
10.1002/adma.201503289
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发表时间：
2015-10-28
影响因子：
29.4
通讯作者：
Lu, Yongfeng
中科院分区：
文献类型：
--
作者：
Wang, Andong;Jiang, Lan;Lu, Yongfeng
提出了一种利用空间调制飞秒激光脉冲对薄膜进行图形化的高分辨率纳米线制备方法。深亚波长（约1/13的激光波长）和高导电性（约1/4的散装金）纳米线在露天制造，而不使用掩模，这提供了一个单步任意直接图案化的方法，电子，等离子体，和光电子纳米器件。
A novel high-resolution nanowire fabrication method is developed by thin-film patterning using a spatially modulated femtosecond laser pulse. Deep subwavelength (approximate to 1/13 of the laser wavelength) and high conductivity (approximate to 1/4 of the bulk gold) nanowires are fabricated in the open air without using masks, which offers a single-step arbitrary direct patterning approach for electronics, plasmonics, and optoelectronics nanodevices.