Nondispersive optical phase shifter array using microelectromechanical systems based gratings.
Nondispersive optical phase shifter array using microelectromechanical systems based gratings.
复制标题
使用基于光栅的微机电系统的非色散光学移相器阵列。
作者：
Guangya Zhou;F. Chau
提出了一种基于微机电系统（MEMS）技术的宽带非色散光学移相器阵列。该装置由微光栅元件阵列组成。每个光栅元件利用平面内平移运动来产生对衍射光束的相移。相移仅取决于光栅位移与其周期的比值，因此与入射波长无关。提出的操作原理进行了演示，使用绝缘体上硅（SOI）微机械加工工艺开发的原型设备。这种MEMS非色散移相器阵列可用于许多多光谱应用，包括宽带光学相控阵列。
We present a broadband nondispersive optical phase shifter array based on microelectromechanical systems (MEMS) technology. The device consists of an array of micro-grating elements. Each grating element utilizes an in-plane translational motion to produce a phase shift to the diffracted light beam. The phase shift is dependent only on the ratio of the grating displacement to its period, and thus independent of incident wavelength. The proposed operation principle was demonstrated with a prototype device developed using a silicon-on-insulator (SOI) micromachining process. This MEMS nondispersive phase-shifter array may be useful in many multispectral applications including broadband optical phased arrays.