Improving sensitivity in electrostatic force detection utilizing cantilever with tailored resonance modes
Improving sensitivity in electrostatic force detection utilizing cantilever with tailored resonance modes
复制标题
DOI：
10.1063/1.2433761
复制
发表时间：
2007-02
影响因子：
4
通讯作者：
K. Kimura;K. Kobayashi;K. Matsushige;Hirofumi Yamada
中科院分区：
文献类型：
--
作者：
K. Kimura;K. Kobayashi;K. Matsushige;Hirofumi Yamada
为了提高Kelvin探针力显微镜或扫描电容力显微镜中电势或电容测量的灵敏度，将施加在针尖和样品之间的交变电场的频率调谐为接近悬臂梁的机械共振频率。作者设计了一个悬臂梁与定制的谐振模式适合这些测量。第一和第二谐振频率的比率通过有限元方法优化。此外，他们根据计算修改了商业上可用的悬臂。在扫描电容力显微镜测量中证明了改性的悬臂梁的性能。
In order to increase the sensitivity of potential or capacitance measurement in Kelvin probe force microscopy or scanning capacitance force microscopy, the frequency of alternating electric field applied between the tip and the sample is tuned close to the mechanical resonance frequencies of the cantilever. The authors have designed a cantilever with a tailored resonance modes suitable for these measurements. The ratio of the first and the second resonance frequencies is optimized by the finite element method. Furthermore, they modified a commercially available cantilever according to the calculation. The performance of the modified cantilever was demonstrated in the scanning capacitance force microscopy measurement.