Design and analysis of piezoresistive microcantilever for surface stress measurement in biochemical sensor
Design and analysis of piezoresistive microcantilever for surface stress measurement in biochemical sensor
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DOI：
10.1016/j.snb.2006.03.053
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发表时间：
2007-01-10
影响因子：
8.4
通讯作者：
Yin, T. I.
中科院分区：
文献类型：
--
作者：
Yang, S. M.;Yin, T. I.
压阻式微悬臂梁已被提出来测量由生化分析物产生的表面应力。这种原位测量对于具有片上微系统集成的生物化学传感器是期望的。建立了四层压阻微悬臂梁的二维模型，分析了生化反应产生的表面应力效应和压阻层引起的热效应。分析表明，这两种影响都不利于传感器测量。通过改变微悬臂梁的纵横比来实现更高的灵敏度的传统智慧是徒劳的。为了提高测量灵敏度，提出了一种改进的固定化层条纹图案设计。更高的灵敏度也可以通过具有更厚的底部绝缘层和更薄的压阻层来获得。结果表明，微悬臂梁的设计是上级的应力集中区（SCR）的设计常见的原子力显微镜（AFM）。(c)2006 Elsevier B.V保留所有权利。
Piezoresistive microcantilever has been proposed to measure the surface stress generated by biochemical analytes. Such in situ measurement is desirable for biochemical sensors with on-chip microsystem integration. A two-dimensional model is presented to analyze the four-layer piezoresistive microcantilever subject to the surface stress effect generated by biochemical reaction and the thermal effect induced by the piezoresistive layer. Analysis shows that both effects are detrimental to sensor measurement. Conventional wisdom by changing the aspect ratio of a microcantilever is futile to achieve higher sensitivity. An improved design by having the stripe pattern on the immobilized layer is developed to increase the measurement sensitivity. Higher sensitivity can also be obtained by having thicker bottom insulation layer and thinner piezoresistive layer. It is shown that the microcantilever design is superior to the stress concentration region (SCR) design commonly seen in atomic force microscopy (AFM). (c) 2006 Elsevier B.V All rights reserved.