Unravelling new principles of site-selective doping contrast in the dual-beam focused ion beam/scanning electron microscope
Unravelling new principles of site-selective doping contrast in the dual-beam focused ion beam/scanning electron microscope
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揭示双束聚焦离子束/扫描电子显微镜中位点选择性掺杂对比的新原理
DOI:
10.1016/j.ultramic.2020.112947
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发表时间:
2020
期刊:
影响因子:
2.2
通讯作者:
Chee A
中科院分区:
文献类型:
--
作者:
Chee A