J. Murota et al.: "Atomically Controlled Processing for Fabrication of Si-based Ultimate-Small Devices"Workshop on Selective and Functional Film Deposition Technologies as Applied to ULSI Technology (29th IUVSTA Workshop), 2nd International Workshop on De
J. Murota et al.: "Atomically Controlled Processing for Fabrication of Si-based Ultimate-Small Devices"Workshop on Selective and Functional Film Deposition Technologies as Applied to ULSI Technology (29th IUVSTA Workshop), 2nd International Workshop on De
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J. Murota 等人：“用于制造硅基终极小型器件的原子控制处理”应用于 ULSI 技术的选择性和功能薄膜沉积技术研讨会（第 29 届 IUVSTA 研讨会），第二届国际研讨会
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