Room temperature replication in spin on glass by nanoimprint technology
Room temperature replication in spin on glass by nanoimprint technology
复制标题
通过纳米压印技术在玻璃上进行室温复制
DOI：
10.1116/1.1417547
复制
发表时间：
2001
影响因子：
1.4
通讯作者：
H. Hiroshima
中科院分区：
文献类型：
--
作者：
S. Matsui;Y. Igaku;H. Ishigaki;J. Fujita;M. Ishida;Y. Ochiai;M. Komuro;H. Hiroshima
研制了一种采用步进电机驱动的小型纳米压印光刻系统。与传统的带液压机的NIL系统相比，NIL系统具有一些额外的特征，例如紧凑和低成本。我们建议使用旋涂玻璃（SOG），而不是PMMA，以避免热膨胀，并证明SOG图案与200 nm的线宽在室温下复制使用NIL系统。SOG图案使用剥离转移到金金属上，并通过反应离子蚀刻转移到硅衬底上。
A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor has been developed. Compared to a conventional NIL system with a hydraulic press, there are some additional features of the NIL system such as compactness and low cost. We propose the use of spin on glass (SOG) instead of PMMA to avoid thermal expansion and demonstrate SOG patterns with 200 nm linewidths at room temperature replications using the NIL system. The SOG patterns were transferred to gold metal using liftoff and to a silicon substrate by reactive ion etching.