NiO thin films by RF-sputtering: effect target nature and substrate bias voltage on structural and electro-optical properties
NiO thin films by RF-sputtering: effect target nature and substrate bias voltage on structural and electro-optical properties
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射频溅射法制备 NiO 薄膜:靶材性质和基底偏压对结构和电光性能的影响
DOI:
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发表时间:
2020
期刊:
影响因子:
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通讯作者:
Patrick LAFFEZ
中科院分区:
文献类型:
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作者:
Quentin SIMON;Tomoya ISHITA;Meriem CHETTAB;Yoshitaka NAKAMURA;Patrick LAFFEZ