NiO thin films by RF-sputtering: effect target nature and substrate bias voltage on structural and electro-optical properties

NiO thin films by RF-sputtering: effect target nature and substrate bias voltage on structural and electro-optical properties
复制标题

射频溅射法制备 NiO 薄膜:靶材性质和基底偏压对结构和电光性能的影响

DOI:
--
复制
发表时间:
2020
期刊:
影响因子:
--
通讯作者:
Patrick LAFFEZ
Patrick LAFFEZ
中科院分区:
--
文献类型:
--
作者:
Quentin SIMON;Tomoya ISHITA;Meriem CHETTAB;Yoshitaka NAKAMURA;Patrick LAFFEZ

文献摘要

相似文献