A smart acoustic emission and mechanical impedance hybrid sensor with static force detecting and dynamic measuring capabilities
A smart acoustic emission and mechanical impedance hybrid sensor with static force detecting and dynamic measuring capabilities
复制标题
具有静态力检测和动态测量功能的智能声发射和机械阻抗混合传感器
DOI：
10.1109/transducers.2013.6626922
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
Zhibo Huang
中科院分区：
文献类型：
--
作者：
G. Feng;Zhibo Huang
本文介绍了一种最先进的智能声发射（AE）和机械阻抗混合传感器（图1）。该传感器可以在两种模式下操作：1）感测从外部源发射的声波，具有能够在安装时检测静态力的功能; 2）通过在对象上施加动态力并感测其反馈速度来测量感兴趣的对象/材料的机械阻抗。这种独特的传感器由三个主要核心元件组成：一个由多层压电聚合物（PVDF）薄膜制成的微加工波浪形传感元件;一个在图案化SU-8柔性基板上制成的用于力/速度检测的微加工应变片;一个用于AE传感和AE耦合到PVDF元件的切割PZT板。文中介绍了该装置的工作原理、制作和测试。铅笔芯断裂和材料表征的实验结果证明了所开发的传感器的功能。
This paper presents a state-of-the-art intelligent acoustic emission (AE) and mechanical impedance hybrid sensor (Fig. 1). The sensor can be operated in two modes: 1) sensing acoustic waves emitted from an external source with the function of being able to detect the static force at installation; 2) measuring the mechanical impedance of the interested object/material by exerting a dynamic force on the object and sensing its feedback velocity. This unique sensor is composed of three major core elements: a micromachined wavy-shaped sensing element made with multi-layer piezoelectric polymer (PVDF) films; a micromachined strain gage made on a patterned SU-8 flexible substrate for force/velocity detection; a diced PZT plate for AE sensing and AE coupling to PVDF element. The device working principle, fabrication and testing are described in the text. Experimental results of pencil lead fracture and material characterization demonstrate the functionality of the developed sensor.