Highly Transparent Wafer-Scale Synthesis of Crystalline WS2 Nanoparticle Thin Film for Photodetector and Humidity-Sensing Applications
Highly Transparent Wafer-Scale Synthesis of Crystalline WS2 Nanoparticle Thin Film for Photodetector and Humidity-Sensing Applications
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DOI：
10.1021/acsami.5b11325
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发表时间：
2016-02-10
影响因子：
9.5
通讯作者：
Jadkar, Sandesh R.
中科院分区：
文献类型：
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作者：
Pawbake, Amit S.;Waykar, Ravindra G.;Jadkar, Sandesh R.
在本研究中，我们报告了一个圆片级的高结晶二硫化钨（WS 2）纳米粒子薄膜的一步合成方法，使用改进的热丝化学气相沉积（HW-CVD）技术。WS 2纳米颗粒的平均尺寸被发现是25-40 nm在整个4英寸。石英衬底的晶片。WS 2纳米颗粒的低角XRD数据显示样品沿沿着（002）方向具有高度结晶性。此外，拉曼光谱显示两个显著的声子振动模式E12 g和A1 g分别在类似于356和类似于420 cm（-1）处，表明材料的高纯度。TEM分析表明样品具有良好的结晶质量。合成的基于WS 2纳米颗粒薄膜的器件显示出良好的湿度响应和良好的光敏性，沿着器件的良好的长期稳定性。结果发现，薄膜的电阻随相对湿度（RH）的增加而减小。WS 2薄膜湿度传感器器件的最大湿度灵敏度为469%沿着响应时间近似为12 s，恢复时间近似为13 s。在光检测的情况下，观察到的响应时间类似于51 s，恢复时间类似于88 s，灵敏度类似于137%，在白色光照明下。我们的研究结果开辟了几条途径来生长其他过渡金属二硫属化物纳米颗粒薄膜的大面积纳米电子学以及工业应用。
In the present investigation, we report a one-step synthesis method of wafer-scale highly crystalline tungsten disulfide (WS2) nanoparticle thin film by using a modified hot wire chemical vapor deposition (HW-CVD) technique. The average size of WS2 nanoparticle is found to be 25-40 nm over an entire 4 in. wafer of quartz substrate. The low-angle XRD data of WS2 nanoparticle shows the highly crystalline nature of sample along with orientation (002) direction. Furthermore, Raman spectroscopy shows two prominent phonon vibration modes of E12g and A1g at similar to 356 and similar to 420 cm(-1), respectively, indicating high purity of material. The TEM analysis shows good crystalline quality of sample. The synthesized WS2 nanoparticle thin film based device shows good response to humidity and good photosensitivity along with good long-term stability of the device. It was found that the resistance of the films decreases with increasing relative humidity (RH). The maximum humidity sensitivity of 469% along with response time of similar to 12 s and recovery time of similar to 13 s were observed for the WS2 thin film humidity sensor device. In the case of photodetection, the response time of similar to 51 s and recovery time of similar to 88 s were observed with sensitivity similar to 137% under white light illumination. Our results open up several avenues to grow other transition metal dichalcogenide nanoparticle thin film for large-area nanoelectronics as well as industrial applications.