Oxidation of the Si(001) surface: lateral growth and formation of P(b0) centers.
Oxidation of the Si(001) surface: lateral growth and formation of P(b0) centers.
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Si(001) 表面的氧化:横向生长和 P(b0) 中心的形成。
DOI:
10.1103/physrevlett.91.146102
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发表时间:
2003
影响因子:
8.6
通讯作者:
T. Uda
中科院分区:
文献类型:
--
作者:
T. Yamasaki;Koichi Kato;T. Uda
More than 100 oxygen-adsorbed configurations with oxygen coverage of up to two monolayers (ML) were studied through first-principles calculations. It was found that oxidation proceeds almost laterally. When the coverage exceeds 1.25 ML, oxygen atoms introduced between the second and third layers are captured at a bridging site in the second layer, generating twofold-coordinated Si atoms. Emission of such twofold-coordinated Si atoms leaves weakly bonded Si pairs in the fourth layer. When such pairs happen to be generated close to each other, they transform into a chain of Si trimers with one P(b0) center at each end.