Si-rich Silicon Nitride for Nonlinear Signal Processing Applications.
Si-rich Silicon Nitride for Nonlinear Signal Processing Applications.
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DOI：
10.1038/s41598-017-00062-6
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发表时间：
2017-02-02
影响因子：
4.6
通讯作者：
Petropoulos P
中科院分区：
文献类型：
--
作者：
Lacava C;Stankovic S;Khokhar AZ;Bucio TD;Gardes FY;Reed GT;Richardson DJ;Petropoulos P
非线性硅光子器件由于能够在中等功率水平下显示出大的三阶非线性效应，从而在小型化元件中实现全光信号处理功能，因此引起了相当大的关注。尽管在这个平台上已经做出了巨大的努力，并且已经展示了许多非线性光学功能，但由于双光子吸收（TPA）和相关效应，非线性硅光子器件的性能基本上仍然局限于电信波长区域。在这项工作中，我们提出了一种替代的cmos兼容平台，基于富硅氮化硅，可以克服这一限制。通过仔细选择材料沉积参数，我们表明可以调整器件的线性和非线性特性，以便在选定的波长区域显示所需的行为。提出了一种严格和系统的不同材料组成的制造和表征活动，使我们能够展示具有低线性损耗（~1.5 dB/cm）和增强Kerr非线性响应（Re{γ} = 16 Wm−1）的无tpa cmos兼容波导。由于这些特性，我们的非线性波导能够产生π非线性相移，为未来光通信应用的实用器件的开发铺平了道路。
Nonlinear silicon photonic devices have attracted considerable attention thanks to their ability to show large third-order nonlinear effects at moderate power levels allowing for all-optical signal processing functionalities in miniaturized components. Although significant efforts have been made and many nonlinear optical functions have already been demonstrated in this platform, the performance of nonlinear silicon photonic devices remains fundamentally limited at the telecom wavelength region due to the two photon absorption (TPA) and related effects. In this work, we propose an alternative CMOS-compatible platform, based on silicon-rich silicon nitride that can overcome this limitation. By carefully selecting the material deposition parameters, we show that both of the device linear and nonlinear properties can be tuned in order to exhibit the desired behaviour at the selected wavelength region. A rigorous and systematic fabrication and characterization campaign of different material compositions is presented, enabling us to demonstrate TPA-free CMOS-compatible waveguides with low linear loss (~1.5 dB/cm) and enhanced Kerr nonlinear response (Re{γ} = 16 Wm−1). Thanks to these properties, our nonlinear waveguides are able to produce a π nonlinear phase shift, paving the way for the development of practical devices for future optical communication applications.