Design, fabrication and characterization of a high Q silica nanobeam cavity with orthogonal resonant modes

Design, fabrication and characterization of a high Q silica nanobeam cavity with orthogonal resonant modes
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具有正交谐振模式的高Q值二氧化硅纳米梁腔的设计、制造和表征

DOI:
10.1109/jphot.2017.2754300
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发表时间:
2017
影响因子:
2.4
通讯作者:
Takasumi Tanabe
Takasumi Tanabe
中科院分区:
工程技术4区
文献类型:
--
作者:
Tomohiro Tetsumoto;Hajime Kumazaki;Kentaro Furusawa;Norihiko Sekine;Takasumi Tanabe

文献摘要

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我们设计并制作了一个高硅纳米束腔,支持横向电(TE)和横向磁模式在1.55米波长范围内。这两种模式获得的值是光子晶体(PhC)的二氧化硅纳米腔的最高报道值。我们还研究了在侧耦合配置与腔耦合的最佳条件。我们实现了87%的耦合效率与TE模式,同时保持负载超过。我们还发现,耦合波导的存在降低了腔的本质,这取决于差距距离。这提供了有用的定量信息,建立一个有效的计划耦合低折射率的PhC纳米腔。
We design and fabricate a highsilica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55m wavelength range. Thevalues obtained for both modes exceedand are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loadedof more than. We also found that the presence of a coupled waveguide reduces the intrinsicof the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities.