Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica
Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica
复制标题
熔融石英内任意长度、均匀直径的三维螺旋微通道的制备
DOI：
10.1364/ol.37.003825
复制
发表时间：
2012-09-15
期刊：
影响因子：
3.6
通讯作者：
Hou, Xun
中科院分区：
文献类型：
--
作者：
He, Shengguan;Chen, Feng;Hou, Xun
我们展示了一种改进的飞秒激光照射，然后通过化学蚀刻工艺来创建复杂的三维（3D）微通道，具有任意长度和均匀的直径内熔融石英。提出了一种引入额外入口和二次功率补偿的分段化学刻蚀方法，该方法可以制备出长度为1.140 cm、深宽比为522的均匀三维螺旋微通道。在此基础上，在石英玻璃内形成了一个由长螺旋微通道和Y型带微通道组成的微混合器。我们测量的混合性能的微混合器通过注入酚酞和NaOH溶液通过两个入口的Y型带微通道。在低雷诺数条件下，三维微混合器实现了快速有效的混合。(C)2012美国光学学会
We demonstrate an improved femtosecond laser irradiation followed by chemical etching process to create complex three-dimensional (3D) microchannels with arbitrary length and uniform diameter inside fused silica. A segmented chemical etching method of introducing extra access ports and a secondary power compensation is presented, which enables the fabrication of uniform 3D helical microchannels with length of 1.140 cm and aspect-ratio of 522. Based on this method, a micromixer which consists of a long helical microchannel and a y-tape microchannel was created inside the fused silica. We measured the mixing properties of the micromixer by injecting the phenolphthalein and NaOH solution through the two inlets of the y-tape microchannel. A rapid and efficient mixing was achieved in the 3D micromixer at a low Reynolds number. (C) 2012 Optical Society of America