Frictional properties of diamondlike carbon layers
Frictional properties of diamondlike carbon layers
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DOI：
10.1063/1.91465
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发表时间：
1980-02
影响因子：
4
通讯作者：
K. Enke;H. Dimigen;H. Huebsch
中科院分区：
文献类型：
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作者：
K. Enke;H. Dimigen;H. Huebsch
以乙炔为工作气体，采用射频等离子体沉积法在硅衬底上沉积了硬质类金刚石碳层。首次测量了氮气氛中滑动摩擦系数μ与水蒸气含量的关系。发现μ随湿度增加而增加，μ的范围为0.01至0.19。钢球被用作摩擦伙伴。通过在摩擦实验期间测量其耐久性来评估层的磨损。与其他出版物相反，已经表明耐久性在相对湿度的0.5-5.0%范围内具有最大值。
Hard diamondlike carbon layers have been deposited on silicon by rf plasma deposition using acetylene as working gas. For the first time the dependence of the sliding friction coefficient μ on the water vapor content of a nitrogen atmosphere was measured. An increase of μ with increasing humidity has been found, with μ ranging from 0.01 to 0.19. A steel ball was employed as the friction partner. The wear of the layers has been assessed by measuring their durability during friction experiments. It has been shown, contrary to other publications, that the durability has a maximum in the range 0.5–5.0% of relative humidity.