Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC
Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC
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DOI：
10.1007/s00339-002-1979-2
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发表时间：
2003-04-01
影响因子：
2.7
通讯作者：
Kiuchi, J
中科院分区：
文献类型：
--
作者：
Yasumaru, N;Miyazaki, K;Kiuchi, J
我们报告观察到的纳米结构上形成的薄TiN和DLC薄膜，由800-和267-nm，飞秒（fs）钛：蓝宝石激光脉冲照射在能量通量略高于烧蚀阈值。在烧蚀的薄膜表面上，线偏振fs脉冲产生几乎与激光偏振方向垂直的精细周期结构阵列，而圆偏振光形成精细点结构。这些表面结构的尺寸是激光波长的1/10-1/5，并且随着激光波长的减小而减小。
We report observation of nanostructures formed on thin TiN and DLC films that were irradiated by 800- and 267-nm, femtosecond (fs) Ti:sapphire laser pulses at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly polarized fs pulses produce arrays of fine periodic structures that are almost oriented to the direction perpendicular to the laser polarization, while the circularly polarized light forms fine-dot structures. The size of these surface structures is 1/10-1/5 of the laser wavelength and decreases with a decrease in the laser wavelength.