A 37-actuator polyimide deformable mirror with electrostatic actuation for adaptive optics microscopy
A 37-actuator polyimide deformable mirror with electrostatic actuation for adaptive optics microscopy
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DOI：
10.1088/1361-6439/ab2370
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发表时间：
2019-06
影响因子：
2.3
通讯作者：
K. Banerjee;Pouya Rajaeipour;H. Zappe;Ç. Ataman
中科院分区：
文献类型：
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作者：
K. Banerjee;Pouya Rajaeipour;H. Zappe;Ç. Ataman
自适应光学在生命科学显微镜中的广泛使用主要受到传统MEMS可变形镜的高成本的阻碍。我们在这里提出了一个潜在的低成本和紧凑的替代形式的静电变形镜，特别是在自适应光学显微镜的应用开发。该器件采用标准微加工工艺制造，使用广泛可用的材料，以最大限度地降低成本，但仍提供卓越的装配后镜面质量。在孔径尺寸为10 mm的情况下，该器件具有<250 nm的制造后均方根镜平面度误差和<15 nm的有源最佳平面度。该膜由铝涂层的3.5米厚的聚酰亚胺膜制成，具有高顺应性，允许在375 V下的最大峰谷行程为15米。使用定制开发的基于优化的开环控制方案驱动，我们成功地再现了高达第五径向阶的Zernike模式，具有高形状保真度。
Widespread use of adaptive optics in life-science microscopy is predominantly hindered by the high cost of conventional MEMS deformable mirrors. We present here a potentially low-cost and compact alternative in the form of an electrostatic deformable mirror developed particularly for applications in adaptive optics microscopy. The device is fabricated with standard micro-machining processes using widely available materials to minimize cost, but still offers exceptional post-assembly mirror quality. With an aperture size of 10 mm, the device has a post-fabrication root-mean-square mirror flatness error of <250 nm and an active best-flat of <15 nm. The membrane is made of an aluminum-coated 3.5 m thick polyimide membrane that has high compliance, allowing a maximum peak-to-valley stroke of 15 m at 375 V. Driven using a custom-developed optimization-based open-loop control scheme, we successfully reproduced Zernike modes of up to fifth radial order with high shape fidelity.