Evidence of local power deposition and electron heating by a standing electromagnetic wave in electron-cyclotron-resonance plasma.
Evidence of local power deposition and electron heating by a standing electromagnetic wave in electron-cyclotron-resonance plasma.
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电子回旋共振等离子体中驻电磁波的局部功率沉积和电子加热的证据。
DOI：
10.1103/physreve.90.033106
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
R. Clergereaux
中科院分区：
文献类型：
--
作者：
A. Durocher;L. Stafford;S. Dap;K. Makasheva;R. Clergereaux
在0.5-15 mTorr压力范围内研究了电子回旋共振激发的微波等离子体。与低限压力条件下，等离子体发射突出了一个相当均匀的空间结构，周期性的空间调制（周期为6.2厘米）出现的压力增加。该特征归因于局部功率沉积（与电子密度相关），这是由于在由反应器壁形成的腔中存在由馈送电磁场（2.45 GHz）产生的电磁驻波。通过朗缪尔探针和光学发射光谱对电子能量概率函数的分析进一步揭示了高能量尾部的存在，该尾部在较高压力下表现出强烈的周期性空间调制。这些高能电子的电子密度和特征温度的空间演化与驻波的波节（最大值）和波腹（最小值）一致。这些空间调制功率沉积和电子加热机制进行了讨论。
Microwave plasmas excited at electron-cyclotron resonance were studied in the 0.5-15 mTorr pressure range. In contrast with low-limit pressure conditions where the plasma emission highlights a fairly homogeneous spatial structure, a periodic spatial modulation (period ∼6.2 cm) appeared as pressure increased. This feature is ascribed to a local power deposition (related to the electron density) due to the presence of a standing electromagnetic wave created by the feed electromagnetic field (2.45 GHz) in the cavity formed by the reactor walls. Analysis of the electron energy probability function by Langmuir probe and optical emission spectroscopy further revealed the presence of a high-energy tail that showed strong periodic spatial modulation at higher pressure. The spatial evolution of the electron density and of the characteristic temperature of these high-energy electrons coincides with the nodes (maximum) and antinodes (minimum) of the standing wave. These spatially-modulated power deposition and electron heating mechanisms are then discussed.