An electrostatically actuated gas valve with an S-shaped film element
An electrostatically actuated gas valve with an S-shaped film element
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DOI：
10.1088/0960-1317/4/4/005
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发表时间：
1994-12
影响因子：
2.3
通讯作者：
Kazuo Sato;M. Shikida
中科院分区：
文献类型：
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作者：
Kazuo Sato;M. Shikida
描述了一种由静电力驱动的新型微阀执行器，并表明它适用于控制稀薄气体的流动。该执行器由一对平面电极组成，电极中间夹着中间有 S 形弯曲的导电薄膜。当电压交替施加在每个电极和薄膜之间时，S 形弯曲来回移动。手动组装的宏观模型致动器具有5μm厚和12mm宽的薄膜，在间隔2.5mm的电极之间操作。在施加电压为 150 V 时，传播速度为 4.0 m s-1。薄膜的大垂直位移使得阀座升程大，从而允许一定量的气流。阀门的实验模型允许在 60 Pa 的压力下实现 10 sccm 的气流速率。
A new microvalve actuator driven by electrostatic force is described and shown to be suitable for controlling the flow of a rarefied gas. The actuator consists of a pair of planar electrodes sandwiching a conductive film that has an S-shaped bend in the middle. The S-bend moves back and forth as voltage is alternately applied between each of the electrodes and the film. A manually assembled macromodel actuator having a film 5 mu m thick and 12 mm wide is operated between electrodes separated by 2.5 mm. The propagation speed is 4.0 m s-1 at an applied voltage of 150 V. The large vertical displacement of the film enables the large valve seat lift necessary to allow a certain amount of gas flow. An experimental model of the valve allowed at airflow rate of 10 sccm at a pressure of 60 Pa.