Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapour deposition
Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapour deposition
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DOI：
10.1088/0957-4484/19/30/305604
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发表时间：
2008-07-30
期刊：
影响因子：
3.5
通讯作者：
Van Haesendonck, Chris
中科院分区：
文献类型：
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作者：
Malesevic, Alexander;Vitchev, Roumen;Van Haesendonck, Chris
如果石墨烯要兑现未来纳米电子设备的承诺，一条简单而廉价的大规模生产路线是必不可少的。提出了一种将等离子体增强化学气相沉积的能力扩展到合成独立的几层石墨烯的方法。在微波等离子体中，通过控制碳自由基的复合，合成了由四到六个原子层堆叠的石墨烯薄片。一种简单且高度可重复性的技术是必不可少的，因为合成的鳞片不需要在任何承受高达700摄氏度的高温的衬底表面上使用催化剂。利用电子显微镜、X射线衍射、拉曼光谱和扫描隧道显微镜对鳞片进行全面的结构分析。电子显微镜和X射线光电子能谱的联合分析表明，得到的石墨烯薄片垂直排列在衬底表面，并按照三步法生长。
If graphene is ever going to live up to the promises of future nanoelectronic devices, an easy and cheap route for mass production is an essential requirement. A way to extend the capabilities of plasma-enhanced chemical vapour deposition to the synthesis of freestanding few-layer graphene is presented. Micrometre-wide flakes consisting of four to six atomic layers of stacked graphene sheets have been synthesized by controlled recombination of carbon radicals in a microwave plasma. A simple and highly reproducible technique is essential, since the resulting flakes can be synthesized without the need for a catalyst on the surface of any substrate that withstands elevated temperatures up to 700 degrees C. A thorough structural analysis of the flakes is performed with electron microscopy, x-ray diffraction, Raman spectroscopy and scanning tunnelling microscopy. The resulting graphene flakes are aligned vertically to the substrate surface and grow according to a three-step process, as revealed by the combined analysis of electron microscopy and x-ray photoelectron spectroscopy.