A review: Structural oxide coatings by laser chemical vapor deposition
A review: Structural oxide coatings by laser chemical vapor deposition
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DOI：
10.1007/s11595-016-1319-6
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发表时间：
2016-02
期刊：
影响因子：
--
通讯作者：
T. Goto
中科院分区：
文献类型：
--
作者：
T. Goto
用激光化学气相沉积法以每小时几百微米的沉积速率制备了氧化钇稳定的氧化锆和α-氧化铝薄膜。此外，还对激光化学气相沉积结构氧化物涂层进行了综述。激光可以显著加速CVD中的化学反应和晶粒生长，从而获得高沉积速率。该薄膜含有大量的纳米孔，起到隔热作用，因此有望作为Ni基高温合金燃气涡轮机叶片和WC-Co切削工具的涂层材料。
Yttria-stabilized zirconia and α-alumina films were prepared by laser chemical vapor deposition at deposition rates of several hundred micrometers per hour. Moreover, the structural oxide coatings by laser chemical vapor deposition are reviewed. The laser can significantly accelerate the chemical reaction and grain growth in CVD, yielding high deposition rates. The films contain large amounts of nanopores that act as thermal insulation and are thus promising as coating materials for gas turbine blades of Ni-based superalloys and WC-Co cutting tools.